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Optical MEMS

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ISBN: 9783039213030 / 9783039213047 Year: Pages: 172 DOI: 10.3390/books978-3-03921-304-7 Language: eng
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Technology (General) --- General and Civil Engineering
Added to DOAB on : 2019-12-09 11:49:15
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Abstract

Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments’ digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal–silicon microsructures. Especially in the last few years, cloud data centers are demanding large-port optical cross connects (OXCs) and autonomous driving looks for miniature LiDAR, and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense.

Keywords

scanning micromirror --- electromagnetic actuator --- angle sensor --- flame retardant 4 (FR4) --- variable optical attenuator (VOA) --- wavelength dependent loss (WDL) --- polarization dependent loss (PDL) --- micro-electro-mechanical systems (MEMS) --- tunable fiber laser --- echelle grating --- DMD chip --- MEMS scanning micromirror --- fringe projection --- laser stripe scanning --- quality map --- large reflection variations --- 3D measurement --- laser stripe width --- vibration noise --- MLSSP --- MEMS scanning mirror --- wavefront sensing --- digital micromirror device --- ocular aberrations --- dual-mode liquid-crystal (LC) device --- infrared Fabry–Perot (FP) filtering --- LC micro-lenses controlled electrically --- spectrometer --- infrared --- digital micromirror device (DMD) --- signal-to-noise ratio (SNR) --- stray light --- programmable spectral filter --- digital micromirror device --- optical switch --- microscanner --- input shaping --- open-loop control --- quasistatic actuation --- residual oscillation --- usable scan range --- higher-order modes --- resonant MEMS scanner --- electrostatic --- parametric resonance --- NIR fluorescence --- intraoperative microscope --- 2D Lissajous --- fluorescence confocal --- metasurface --- metalens --- field of view (FOV) --- achromatic --- Huygens’ metalens --- bio-optical imaging --- optical coherence tomography --- confocal --- two-photon --- spectrometer --- MEMS mirror --- electrothermal bimorph --- Cu/W bimorph --- electrothermal actuation --- reliability --- n/a

MEMS Technology for Biomedical Imaging Applications

Authors: ---
ISBN: 9783039216048 / 9783039216055 Year: Pages: 218 DOI: 10.3390/books978-3-03921-605-5 Language: eng
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Technology (General) --- General and Civil Engineering
Added to DOAB on : 2019-12-09 11:49:16
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Biomedical imaging is the key technique and process to create informative images of the human body or other organic structures for clinical purposes or medical science. Micro-electro-mechanical systems (MEMS) technology has demonstrated enormous potential in biomedical imaging applications due to its outstanding advantages of, for instance, miniaturization, high speed, higher resolution, and convenience of batch fabrication. There are many advancements and breakthroughs developing in the academic community, and there are a few challenges raised accordingly upon the designs, structures, fabrication, integration, and applications of MEMS for all kinds of biomedical imaging. This Special Issue aims to collate and showcase research papers, short commutations, perspectives, and insightful review articles from esteemed colleagues that demonstrate: (1) original works on the topic of MEMS components or devices based on various kinds of mechanisms for biomedical imaging; and (2) new developments and potentials of applying MEMS technology of any kind in biomedical imaging. The objective of this special session is to provide insightful information regarding the technological advancements for the researchers in the community.

Keywords

tilted microcoil --- electromagnetically-driven --- surface micromachining --- polyimide capillary --- MEMS --- ego-motion estimation --- indoor navigation --- monocular camera --- scale ambiguity --- wearable sensors --- photoacoustic --- microelectromechanical systems (MEMS) --- miniaturized microscope --- lead-free piezoelectric materials --- high frequency ultrasonic transducer --- needle-type --- high spatial resolution --- ultrahigh frequency ultrasonic transducer --- Si lens --- tight focus --- finite element simulation --- low noise amplifier (LNA) --- noise figure --- smart hydrogels --- bio-sensors --- chemo-sensor --- electrochemical sensors --- transduction techniques --- near-field microwave --- microwave resonator --- microwave remote sensing --- potentiometric sensor --- gold nanoparticles --- metal oxide field-effect transistor --- chemo-FET --- bio-FET --- photoacoustic imaging --- microelectromechanical systems (MEMS) --- MEMS scanning mirror --- micromachined US transducer --- microring resonator --- acoustic delay line --- MEMS mirror --- Lissajous scanning --- pseudo-resonant --- sensing --- imaging --- display --- MEMS actuators --- microendoscopy --- confocal --- two-photon --- wide-filed imaging --- photoacoustic --- fluorescence --- scanner --- capacitive micromachined ultrasonic transducer (CMUT) --- acoustics --- micromachining --- capacitive --- transducer --- modelling --- fabrication --- 3D Printing --- piezoelectric array --- ultrasonic transducer --- ultrasonic imaging --- micro-optics --- bioimaging --- microtechnology --- microelectromechanical systems (MEMS) --- in vitro --- in vivo --- cantilever waveguide --- electrostatic actuator --- non-resonating scanner --- optical scanner --- push-pull actuator --- rib waveguide --- n/a

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eng (2)


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2019 (2)