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MEMS Accelerometers

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ISBN: 9783038974147 / 9783038974154 Year: Pages: 252 DOI: 10.3390/books978-3-03897-415-4 Language: eng
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Technology (General) --- General and Civil Engineering
Added to DOAB on : 2019-06-26 08:44:06
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Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc.

Keywords

low-temperature co-fired ceramic (LTCC) --- capacitive accelerometer --- wireless --- process optimization --- performance characterization --- MEMS accelerometer --- mismatch of parasitic capacitance --- electrostatic stiffness --- high acceleration sensor --- piezoresistive effect --- MEMS --- micro machining --- turbulent kinetic energy dissipation rate --- probe --- microelectromechanical systems (MEMS) piezoresistive sensor chip --- Taguchi method --- marine environmental monitoring --- accelerometer --- frequency --- acceleration --- heat convection --- motion analysis --- auto-encoder --- dance classification --- deep learning --- self-coaching --- wavelet packet --- classification of horse gaits --- MEMS sensors --- gait analysis --- rehabilitation assessment --- body sensor network --- MEMS accelerometer --- electromechanical delta-sigma --- built-in self-test --- in situ self-testing --- digital resonator --- accelerometer --- activity monitoring --- regularity of activity --- sleep time duration detection --- indoor positioning --- WiFi-RSSI radio map --- MEMS-IMU accelerometer --- zero-velocity update --- step detection --- stride length estimation --- field emission --- hybrid integrated --- vacuum microelectronic --- cathode tips array --- interface ASIC --- micro-electro-mechanical systems (MEMS) --- delaying mechanism --- safety and arming system --- accelerometer --- multi-axis sensing --- capacitive transduction --- inertial sensors --- three-axis accelerometer --- micromachining --- miniaturization --- stereo visual-inertial odometry --- fault tolerant --- hostile environment --- MEMS-IMU --- mode splitting --- Kerr noise --- angular-rate sensing --- whispering-gallery-mode --- optical microresonator --- three-axis acceleration sensor --- MEMS technology --- sensitivity --- L-shaped beam --- n/a

MEMS/NEMS Sensors: Fabrication and Application

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ISBN: 9783039216345 / 9783039216352 Year: Pages: 242 DOI: 10.3390/books978-3-03921-635-2 Language: eng
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Technology (General) --- General and Civil Engineering
Added to DOAB on : 2019-12-09 16:10:12
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Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors. Despite a long history of development, fabrication of novel MEMS/NEMS devices still poses unique challenges due to their requirement for a suspended geometry; and many new fabrication techniques have been proposed to overcome these challenges. However, further development of these techniques is still necessary, as newer materials such as compound semiconductors, and 2-dimensional materials are finding their way in various MEMS/NEMS applications, with more complex structures and potentially smaller dimensions.

Keywords

thermoelectric power sensor --- wideband --- GaAs MMIC --- MEMS --- floating slug --- back cavity --- microwave measurement --- MEMS --- high temperature pressure sensors --- AlGaN/GaN circular HFETs --- GaN diaphragm --- adaptive control --- backstepping approach --- tracking performance --- microgyroscope --- resonant frequency --- resistance parameter --- micro fluidic --- oil detection --- MEMS --- microactuator --- magnetic --- micro-NIR spectrometer --- scanning grating mirror --- deflection position detector --- dual-mass MEMS gyroscope --- frequency tuning --- frequency split --- quadrature modulation signal --- frequency mismatch --- suspended micro hotplate --- single-layer SiO2 --- temperature uniformity --- power consumption --- infrared image --- MEMS (micro-electro-mechanical system) --- inertial switch --- acceleration switch --- threshold accuracy --- squeeze-film damping --- photonic crystal cavity --- photonic crystal nanobeam cavity --- optical sensor --- refractive index sensor --- nanoparticle sensor --- optomechanical sensor --- temperature sensor --- Accelerometer readout --- low noise --- low zero-g offset --- microfluidic --- femtosecond laser --- rapid fabrication --- glass welding --- bonding strength --- accelerometer design --- spring design --- analytical model --- gas sensor --- micropellistor --- microdroplet --- pulse inertia force --- methane --- tetramethylammonium hydroxide (TMAH) --- wet etching --- silicon --- 3D simulation --- level-set method --- single crystal silicon --- anisotropy --- vibrating ring gyroscope --- frequency split --- accelerometer --- tunnel magnetoresistive effect --- electrostatic force feedback --- n/a

Improving Practice and Performance in Basketball

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ISBN: 9783039216949 / 9783039216956 Year: Pages: 106 DOI: 10.3390/books978-3-03921-695-6 Language: eng
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Sports Science
Added to DOAB on : 2019-12-09 11:49:16
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Despite being one of the most popular sports worldwide, basketball has received limited research attention compared to other team sports. Establishing a strong evidence base with high-quality and impactful research is essential in enhancing decision-making processes to optimize player performance for basketball professionals. Consequently, the book entitled Improving Performance and Practice in Basketball provides a collection of novel research studies to increase the available evidence on various topics with strong translation to practice in basketball. The book includes work by 40 researchers from 16 institutions or professional organizations from 9 countries. In keeping with notable topics in basketball research, the book contains 2 reviews focused on monitoring strategies to detect player fatigue and considerations for travel in National Basketball Association players. In addition, 8 applied studies are also included in the book, focused on workload monitoring, game-related statistics, and the measurement of physical and skill attributes in basketball players. This book also has a strong focus on increasing the evidence available for female basketball players, who have traditionally been under-represented in the literature. The outcomes generated from this book should provide new insights to inform practice in many areas for professionals working in various roles with basketball teams.

Development of CMOS-MEMS/NEMS Devices

Authors: ---
ISBN: 9783039210688 / 9783039210695 Year: Pages: 165 DOI: 10.3390/books978-3-03921-069-5 Language: eng
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Technology (General) --- General and Civil Engineering
Added to DOAB on : 2019-06-26 08:44:07
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Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]

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