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MEMS Accelerometers

Authors: --- ---
ISBN: 9783038974147 / 9783038974154 Year: Pages: 252 DOI: 10.3390/books978-3-03897-415-4 Language: eng
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Technology (General) --- General and Civil Engineering
Added to DOAB on : 2019-06-26 08:44:06
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Abstract

Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc.

Keywords

low-temperature co-fired ceramic (LTCC) --- capacitive accelerometer --- wireless --- process optimization --- performance characterization --- MEMS accelerometer --- mismatch of parasitic capacitance --- electrostatic stiffness --- high acceleration sensor --- piezoresistive effect --- MEMS --- micro machining --- turbulent kinetic energy dissipation rate --- probe --- microelectromechanical systems (MEMS) piezoresistive sensor chip --- Taguchi method --- marine environmental monitoring --- accelerometer --- frequency --- acceleration --- heat convection --- motion analysis --- auto-encoder --- dance classification --- deep learning --- self-coaching --- wavelet packet --- classification of horse gaits --- MEMS sensors --- gait analysis --- rehabilitation assessment --- body sensor network --- MEMS accelerometer --- electromechanical delta-sigma --- built-in self-test --- in situ self-testing --- digital resonator --- accelerometer --- activity monitoring --- regularity of activity --- sleep time duration detection --- indoor positioning --- WiFi-RSSI radio map --- MEMS-IMU accelerometer --- zero-velocity update --- step detection --- stride length estimation --- field emission --- hybrid integrated --- vacuum microelectronic --- cathode tips array --- interface ASIC --- micro-electro-mechanical systems (MEMS) --- delaying mechanism --- safety and arming system --- accelerometer --- multi-axis sensing --- capacitive transduction --- inertial sensors --- three-axis accelerometer --- micromachining --- miniaturization --- stereo visual-inertial odometry --- fault tolerant --- hostile environment --- MEMS-IMU --- mode splitting --- Kerr noise --- angular-rate sensing --- whispering-gallery-mode --- optical microresonator --- three-axis acceleration sensor --- MEMS technology --- sensitivity --- L-shaped beam --- n/a

Modern Sample Preparation Approaches for Separation Science

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ISBN: 9783039214112 / 9783039214129 Year: Pages: 282 DOI: 10.3390/books978-3-03921-412-9 Language: eng
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Science (General) --- Chemistry (General) --- Analytical Chemistry
Added to DOAB on : 2019-12-09 11:49:15
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This book will provide the most recent knowledge and advances in Sample Preparation Techniques for Separation Science. Everyone working in a laboratory must be familiar with the basis of these technologies, and they often involve elaborate and time-consuming procedures that can take up to 80% of the total analysis time. Sample preparation is an essential step in most of the analytical methods for environmental and biomedical analysis, since the target analytes are often not detected in their in-situ forms, or the results are distorted by interfering species. In the past decade, modern sample preparation techniques have aimed to comply with green analytical chemistry principles, leading to simplification, miniaturization, easy manipulation of the analytical devices, low costs, strong reduction or absence of toxic organic solvents, as well as low sample volume requirements.Modern Sample Preparation Approaches for Separation Science also provides an invaluable reference tool for analytical chemists in the chemical, biological, pharmaceutical, environmental, and forensic sciences.

Keywords

vitamins --- extraction --- determination --- review --- sample preparation --- matrix solid phase dispersion --- sorbent --- miniaturization --- on-line --- blueberry --- non-anthocyanin polyphenol --- vortex-assisted dispersive liquid-liquid microextraction --- response surface methodology --- desirability function approach --- nail --- curie temperature --- high-frequency heating --- liquid chromatography–tandem mass spectrometry --- caffeine --- amlodipine --- gas chromatography --- hydrogel --- hormones --- pectin --- polyvinyl alcohol --- sample preparation --- in-tube SPME --- UHPLC-MS/MS --- organic-based monoliths --- antipsychotics --- plasma samples --- schizophrenic’ patients --- salting-out assisted liquid–liquid extraction --- sugaring-out assisted liquid–liquid extraction --- hydrophobic-solvent assisted liquid–liquid extraction --- subzero-temperature assisted liquid–liquid extraction --- phenolic compounds --- sorbent-based techniques --- multi-spheres adsorptive micro-extraction (MSA?E) --- floating sampling technology --- caffeine and acetaminophen tracers --- environmental water matrices --- vortex-assisted dispersive liquid-liquid microextraction --- China herbal tea --- pesticides residue --- aflatoxins --- UPLC-MS/MS --- vortex-synchronized matrix solid-phase dispersion --- crab shells --- ionic liquids --- anthraquinones --- Cassiae Semen --- sample preparation --- nanocomposite --- pathogenic --- enrichment --- nucleic acid isolation --- sample preparation with TLC/HPTLC --- solvent front position extraction --- solvent delivery with a moving pipette --- automation --- LC–MS/MS --- environmental analysis --- whole water --- trace analysis --- SPE --- large volume --- in-line filter --- sand --- flow rate --- pharmaceuticals --- hormones --- pesticides --- space instrumentation --- liquid chromatography --- oligopeptides --- trapping system --- membrane-based microextraction --- barbiturates --- simultaneous determination --- whole blood --- urine --- liver --- sample preparation --- oxylipins --- protein precipitation --- liquid–liquid extraction --- solid-phase extraction --- biological samples --- chlorophenoxy acid herbicides --- HPLC --- hydrophobic in-tube solid-phase microextraction --- poly (OMA-co-TRIM) monolithic column --- rice grains --- gold --- sample preparation --- preconcentration --- geological samples

Gas Flows in Microsystems

Authors: ---
ISBN: 9783039215423 / 9783039215430 Year: Pages: 220 DOI: 10.3390/books978-3-03921-543-0 Language: eng
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Technology (General)
Added to DOAB on : 2019-12-09 11:49:16
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Abstract

The last two decades have witnessed a rapid development of microelectromechanical systems (MEMS) involving gas microflows in various technical fields. Gas microflows can, for example, be observed in microheat exchangers designed for chemical applications or for cooling of electronic components, in fluidic microactuators developed for active flow control purposes, in micronozzles used for the micropropulsion of nano and picosats, in microgas chromatographs, analyzers or separators, in vacuum generators and in Knudsen micropumps, as well as in some organs-on-a-chip, such as artificial lungs. These flows are rarefied due to the small MEMS dimensions, and the rarefaction can be increased by low-pressure conditions. The flows relate to the slip flow, transition or free molecular regimes and can involve monatomic or polyatomic gases and gas mixtures. Hydrodynamics and heat and mass transfer are strongly impacted by rarefaction effects, and temperature-driven microflows offer new opportunities for designing original MEMS for gas pumping or separation. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel theoretical and numerical models or data, as well as on new experimental results and technics, for improving knowledge on heat and mass transfer in gas microflows. Papers dealing with the development of original gas MEMS are also welcome.

Keywords

pressure drop --- microchannels --- heat sinks --- slip flow --- electronic cooling --- Knudsen pump --- thermally induced flow --- gas mixtures --- direct simulation Monte Carlo (DSMC) --- microfluidic --- rarefied gas flows --- micro-scale flows --- Knudsen layer --- computational fluid dynamics (CFD) --- OpenFOAM --- Micro-Electro-Mechanical Systems (MEMS) --- Nano-Electro-Mechanical Systems (NEMS) --- backward facing step --- gaseous rarefaction effects --- fractal surface topography --- modified Reynolds equation --- aerodynamic effect --- bearing characteristics --- underexpansion --- Fanno flow --- flow choking --- compressibility --- binary gas mixing --- micro-mixer --- DSMC --- splitter --- mixing length --- control mixture composition --- preconcentrator --- microfluidics --- miniaturized gas chromatograph --- BTEX --- PID detector --- ultraviolet light-emitting diode (UV LED) --- spectrophotometry --- UV absorption --- gas sensors --- Benzene, toluene, ethylbenzene and xylene (BTEX) --- toluene --- hollow core waveguides --- capillary tubes --- gas mixing --- pulsed flow --- modular micromixer --- multi-stage micromixer --- modelling --- photoionization detector --- microfluidics --- microfabrication --- volatile organic compound (VOC) detection --- toluene --- supersonic microjets --- Pitot tube --- Knudsen pump --- thermal transpiration --- vacuum micropump --- rarefied gas flow --- kinetic theory --- microfabrication --- photolithography --- microfluidics --- resonant micro-electromechanical-systems (MEMS) --- micro-mirrors --- out-of-plane comb actuation --- fluid damping --- analytical solution --- FE analysis --- miniaturization --- gas flows in micro scale --- measurement and control --- integrated micro sensors --- advanced measurement technologies --- n/a

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MDPI - Multidisciplinary Digital Publishing Institute (3)


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eng (3)


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2019 (3)