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Glassy Materials Based Microdevices

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ISBN: 9783038976189 Year: Pages: 284 DOI: 10.3390/books978-3-03897-619-6 Language: eng
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Electrical and Nuclear Engineering --- General and Civil Engineering --- Technology (General)
Added to DOAB on : 2019-03-21 15:50:41
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Abstract

Microtechnology has changed our world since the last century, when silicon microelectronics revolutionized sensor, control and communication areas, with applications extending from domotics to automotive, and from security to biomedicine. The present century, however, is also seeing an accelerating pace of innovation in glassy materials; as an example, glass-ceramics, which successfully combine the properties of an amorphous matrix with those of micro- or nano-crystals, offer a very high flexibility of design to chemists, physicists and engineers, who can conceive and implement advanced microdevices. In a very similar way, the synthesis of glassy polymers in a very wide range of chemical structures offers unprecedented potential of applications. The contemporary availability of microfabrication technologies, such as direct laser writing or 3D printing, which add to the most common processes (deposition, lithography and etching), facilitates the development of novel or advanced microdevices based on glassy materials. Biochemical and biomedical sensors, especially with the lab-on-a-chip target, are one of the most evident proofs of the success of this material platform. Other applications have also emerged in environment, food, and chemical industries. The present Special Issue of Micromachines aims at reviewing the current state-of-the-art and presenting perspectives of further development. Contributions related to the technologies, glassy materials, design and fabrication processes, characterization, and, eventually, applications are welcome.

Keywords

micro-crack propagation --- severing force --- quartz glass --- micro-grinding --- microfluidics --- single-cell analysis --- polymeric microfluidic flow cytometry --- single-cell protein quantification --- glass molding process --- groove --- roughness --- filling ratio --- label-free sensor --- optofluidic microbubble resonator --- detection of small molecules --- chalcogenide glass --- infrared optics --- precision glass molding --- aspherical lens --- freeform optics --- micro/nano patterning --- 2D colloidal crystal --- soft colloidal lithography --- strain microsensor --- vectorial strain gauge --- compound glass --- microsphere --- resonator --- lasing --- sensing --- microresonator --- whispering gallery mode --- long period grating --- fiber coupling --- distributed sensing --- chemical/biological sensing --- direct metal forming --- glassy carbon micromold --- enhanced boiling heat transfer --- metallic microstructure --- microspheres --- microdevices --- glass --- polymers --- solar energy --- nuclear fusion --- thermal insulation --- sol-gel --- Ag nanoaggregates --- Yb3+ ions --- down-shifting --- photonic microdevices --- alkali cells --- MEMS vapor cells --- optical cells --- atomic spectroscopy --- microtechnology --- microfabrication --- MEMS --- microfluidic devices --- laser materials processing --- ultrafast laser micromachining --- ultrafast laser welding --- enclosed microstructures --- glass --- porous media --- fluid displacement --- spray pyrolysis technique --- dielectric materials --- luminescent materials --- photovoltaics --- frequency conversion --- device simulations --- europium --- luminescence --- hybrid materials --- microdevices --- light --- photon --- communications --- waveguides --- fibers --- biosensors --- microstructured optical fibers --- whispering gallery modes --- light localization --- optofluidics --- lab-on-a-chip --- femtosecond laser --- laser micromachining --- diffusion

MEMS Accelerometers

Authors: --- ---
ISBN: 9783038974147 / 9783038974154 Year: Pages: 252 DOI: 10.3390/books978-3-03897-415-4 Language: eng
Publisher: MDPI - Multidisciplinary Digital Publishing Institute
Subject: Technology (General) --- General and Civil Engineering
Added to DOAB on : 2019-06-26 08:44:06
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Abstract

Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc.

Keywords

low-temperature co-fired ceramic (LTCC) --- capacitive accelerometer --- wireless --- process optimization --- performance characterization --- MEMS accelerometer --- mismatch of parasitic capacitance --- electrostatic stiffness --- high acceleration sensor --- piezoresistive effect --- MEMS --- micro machining --- turbulent kinetic energy dissipation rate --- probe --- microelectromechanical systems (MEMS) piezoresistive sensor chip --- Taguchi method --- marine environmental monitoring --- accelerometer --- frequency --- acceleration --- heat convection --- motion analysis --- auto-encoder --- dance classification --- deep learning --- self-coaching --- wavelet packet --- classification of horse gaits --- MEMS sensors --- gait analysis --- rehabilitation assessment --- body sensor network --- MEMS accelerometer --- electromechanical delta-sigma --- built-in self-test --- in situ self-testing --- digital resonator --- accelerometer --- activity monitoring --- regularity of activity --- sleep time duration detection --- indoor positioning --- WiFi-RSSI radio map --- MEMS-IMU accelerometer --- zero-velocity update --- step detection --- stride length estimation --- field emission --- hybrid integrated --- vacuum microelectronic --- cathode tips array --- interface ASIC --- micro-electro-mechanical systems (MEMS) --- delaying mechanism --- safety and arming system --- accelerometer --- multi-axis sensing --- capacitive transduction --- inertial sensors --- three-axis accelerometer --- micromachining --- miniaturization --- stereo visual-inertial odometry --- fault tolerant --- hostile environment --- MEMS-IMU --- mode splitting --- Kerr noise --- angular-rate sensing --- whispering-gallery-mode --- optical microresonator --- three-axis acceleration sensor --- MEMS technology --- sensitivity --- L-shaped beam --- n/a

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